The determination of local structural units in amorphous SiBN 3C by means of X-ray photoelectron and X-ray absorption spectroscopy |
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| Authors: | R Franke St Bender I Arzberger J Hormes M Jansen H Jüngermann and J Löffelholz |
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| Institution: | (1) Physikalisches Institut, Universität Bonn, Nußallee 12, D-53115 Bonn, Germany;(2) Anorganisch-Chemisches Institut, Universität Bonn, Gerhard-Domagk-Strasse 1, D-53121 Bonn, Germany |
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| Abstract: | X-ray photoelectron spectroscopy (XPS) and X-ray absorption near edge structure (XANES) spectroscopy at the K-edge of Si, N, and B are presented as techniques suited to determine structural units in amorphous SiBN3C. The measurements reported give evidence for the presence of tetrahedral (SiN4)- and planar (BN3)-groups. It is concluded that these structural elements dominate the atomic surroundings of B and Si, respectively. From the spectroscopic results we conclude that C is mainly bonded to N and is not present as a pure carbide. |
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