Study of the microporosity in nanoporous carbon films by small-angle X-ray scattering

The structural difference in the microporous structures of nanoporous carbon films is revealed by small-angle X-ray scattering; it consists in a higher porosity of the layers formed from the titanium carbide. The pore shape is shown to be equiaxed. Pores 20 Å in diameter mainly contribute to the porosity of the nanoporous carbon films. The characteristics of the porous structure of the nanoporous carbon layers synthesized from the titanium or silicon carbide are found using small-angle X-ray scattering. The porous structure is shown to consist of two size fractions of equiaxed pores 10 and 40 Å in radius. The porosity of the films is mainly contributed by the pores of the small size fraction; their fraction is 46 or 10% for the layers synthesized from the titanium or silicon carbide, respectively.