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GaAs thermal oxidation with participation of spatially separated activator oxides (MnO + PbO and MnO + V2O5)
Authors:V. F. Kostryukov  I. A. Donkareva  V. R. Pshestanchik  B. L. Agapov  S. I. Lopatin  I. Ya. Mittova
Affiliation:(1) Voronezh State University, Universitetskaya pl. 1, Voronezh, 394893, Russia;(2) St. Petersburg State University, Universitetskaya nab. 7/9, St. Petersburg, 199034, Russia
Abstract:Spatial separation of activator oxides in MnO2 + PbO and MnO2 + V2O5 binary compositions helps to locate the interactions between the oxides that lead to nonlinear joint effects of the compositions on GaAs thermal oxidation. The mutual enhancement of the chemostimulating activity (a positive nonlinear effect) was discovered in the solid phase, whereas vapor-phase processes led to a considerable negative nonadditivity of the joint chemostimulating effect.
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