合成CVD金刚石涂层用硬质合金基体预处理工艺优化研究

以CH3COCH3和H2为反应气源,采用热丝CVD法在经过两步法和三步法预处理的YG6硬质合金(WC-6wt;Co)基体上沉积金刚石涂层.利用扫描电子显微镜和能谱仪分析检测预处理后的YG6基体的表面形貌和钴含量,通过对比三步法与两步法的预处理结果确定三步法最佳工艺.利用扫描电镜、X射线衍射仪和硬度计检测所得金刚石涂层的表面形貌、结晶性和膜基结合性.结果表明:三步法最佳工艺为先采用酸溶液腐蚀20 s,然后采用碱溶液腐蚀20 min,最后继续用酸溶液腐蚀3 min.三步法预处理后的YG6基体获得的金刚石薄膜生长更加均匀致密,晶粒取向更高,膜基结合性能更好.

Pretreatment Process Optimization of Carbide Matrix Used for CVD Diamond Coatings

Diamond coatings were synthesized on the cemented carbide substrates of WC-6wt%Co pretreated by two-step and three-step pretreatments in CH3COCH3/H2 ambient adopt hot filament chemical vapor deposition.The WC-6wt%Co substrates pretreated were tested by scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS) to analyze the surface morphologies and cobalt content of WC-6wt%Co substrates.The optimum of three-step pretreatment was obtained thorough the comparison of pretreatment results between two-step and three-step pretreatment.surface morphology, crystalline property, adhesion between films and WC-6wt%Co substrates of diamond coatings were analyzed by SEM,X-ray diffraction (XRD) and hardness tester.