PEM控制合成碳掺杂钛氧薄膜的成分结构研究

采用等离子体发射监测(PEM)系统实现闭环控制反应气体流量,使反应溅射稳定在滞回曲线过渡区,并以气相CO2和O2为碳源和氧源制备了碳掺杂钛氧(C∶Ti-O)薄膜.采用原子力显微镜、掠入射X射线衍射和X射线光电子能谱表征薄膜的表面形貌、结构、成分,紫外-可见分光光度计测试薄膜透射率并用Tauc作图法计算薄膜的带隙宽度.结果表明,随着辉光强度设定点(SP)的增大,沉积速率增大,薄膜中Ti-C键含量增多,带隙宽度降低,薄膜的结晶性增强且有利于金红石相的形成.

Study on Composition and Structure of Carbon Doped Ti-O Thin Films Prepared by PEM Control

Carbon doped Ti-O (C∶Ti-O) films were prepared using CO2 and O2 as carbon and oxygen source, and during the deposition Plasma Emission Monitoring (PEM) system was used to realize the closed-loop control of reaction gas and stabilize the reactive sputtering in the hysteresis transition region.The surface morphology, structure and composition of the films were characterized by AFM, Grazing Incidence X-ray Diffraction and XPS.The transmittance of the films was measured by UV-Vis spectrophotometer and the bandgap of the thin films was also calculated by Tauc mapping method.The results show that with the increase of the glow intensity set point (SP), the deposition rate and Ti-C bond content in the C∶Ti-O thin film increase, the bandgap decrease.Increasing SP can enchance the crystallinity of the film and is favorable to the formation of the rutile phase.