底表面光栅结构对于红外热探测器效率影响的研究

红外热探测器利用敏感材料的电学特性,将吸收的热量转化为电信号由检测电路检出,但其吸收效率并不理想.利用底表面光栅结构的大反射率特性,促进红外探测器结构的二次吸收,可有效提高探测器的吸收效率.基于电磁场理论,分析了结构参数对红外光学吸收的影响,利用数值模拟的方法,并通过结构参数的优化使吸收结构在整个波长范围内平均吸收效率提高了近一倍.

Study on Improving the Absorption Efficiency of Uncooled Sensor by Using Bottom Grating

Infrared detectors using electric property of sensitive material, convert temperature change into electrical signal, which can be tested by the readout circuit.And the absorption rate is low.By using bottom grating structure of high reflectance, the transmission light can be absorbed twice and absorption of infrared detectors can be improved.The effect of the structural parameters on the absorption characteristics was analyzed based on the electromagnetic field theory.Numerical simulation results show that the average absorption efficiency of a detector can be doubled by optimizing the structure parameters in whole wavelength range.