| 微细塑性铣削单晶硅实验研究 |
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| 引用本文： | 程祥,高斌,杨先海,刘军营,田忠强.微细塑性铣削单晶硅实验研究[J].山东理工大学学报,2012(4):53-55,60. |
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| 作者姓名： | 程祥 高斌 杨先海 刘军营 田忠强 |
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| 作者单位： | 山东理工大学机械工程学院;温州职业技术学院机械工程系 |
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| 基金项目： | 山东省自然科学基金资助项目(ZR2011EEM010);山东理工大学青年教师发展支持计划 |
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| 摘 要： | 为了深入探讨塑性铣削单晶硅的切削机理,对单晶硅进行了微细铣削实验研究.结果表明,合理地设定铣削参数与保证特定的铣削环境都很重要,在这个前提下,可以实现塑性切削,在单晶硅上获得具有完整几何外形的特征,同时表面质量可以达到单纳米级别.
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| 关 键 词： | 微细加工 微细铣削 塑性切削 单晶硅 |
Experimental study on the ductile-mode micro milling of single crystalline silicon |
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| CHENG Xiang,GAO Bin,YANG Xian-hai,LIU Jun-ying,TIAN Zhong-qiang.Experimental study on the ductile-mode micro milling of single crystalline silicon[J].Journal of Shandong University of Technology:Science and Technology,2012(4):53-55,60. |
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| Authors: | CHENG Xiang GAO Bin YANG Xian-hai LIU Jun-ying TIAN Zhong-qiang |
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| Institution: | 1(1.School of Mechanical Engineering,Shandong University of Technology,Zibo 255091,China; 2.Machine Engineering Department,Wenzhou Vocational & Technical College,Wenzhou 325035,China) |
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| Abstract: | Aiming at discovering the ductile-mode milling mechanism for single crystalline silicon,experimental study on micro milling is processed.The results show that it has the same significance for reasonable setting of micro milling parameters and cutting environment.Under this circumstance,ductile-mode machining can be achieved to obtain integral geometrical features and single nano-level surface quality on single crystalline silicon. |
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| Keywords: | micro machining micro milling ductile-mode machining single crystalline silicon |
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