| 衬底温度对In2S3薄膜结构及其性能的影响 |
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| 引用本文： | 张啸,王华,许积文,杨玲,任明放. 衬底温度对In2S3薄膜结构及其性能的影响[J]. 人工晶体学报, 2011, 40(2): 415-418 |
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| 作者姓名： | 张啸 王华 许积文 杨玲 任明放 |
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| 作者单位： | 桂林电子科技大学材料科学与工程学院,桂林,541004 |
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| 基金项目： | 广西研究生教育创新计划 |
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| 摘 要： | 采用超声喷雾热解法,在玻璃基底上一步合成了In2S3薄膜.研究了衬底温度对In2S3薄膜的结构、表面形貌、电学和光学性能影响.结果表明:所制备的In2S3薄膜均具有沿(220)面择优取向生长特性且无其他杂相,衬底温度对薄膜的均匀性、致密度、结晶程度均有明显影响,并因此影响薄膜的光电性能.薄膜的导电件随着衬底温度的升高迅速增强,但足在衬底温度为350℃时有所降低.衬底温度为300℃所制备的薄膜在可见光区透光率最高达到90;以上,禁带宽度达到2.43 eV.
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| 关 键 词： | 超声喷雾热解 In2S3薄膜 衬底温度 禁带宽度, |
Effect of Substrate Temperature on Structure and Properties of In2S3 Films |
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| ZHANG Xiao,WANG Hua,XU Ji-wen,YANG Ling,REN Ming-fang. Effect of Substrate Temperature on Structure and Properties of In2S3 Films[J]. Journal of Synthetic Crystals, 2011, 40(2): 415-418 |
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| Authors: | ZHANG Xiao WANG Hua XU Ji-wen YANG Ling REN Ming-fang |
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| Affiliation: | ZHANG Xiao,WANG Hua,XU Ji-wen,YANG Ling,REN Ming-fang(School of Material Science and Engineering,Guilin University of Electronic Technology,Guilin 541004,China) |
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| Abstract: | In2S3 thin films were prepared on glass substrates by ultrasonic spray pyrolysis method.The effect of substrate temperatures on the structure,surface morphology and photoelectric properties of films were investigated.The results indicated that the as-prepared In2S3 thin films have a preferential orientation along the(220) direction and no other phases were observed.The growth temperatures have great effect on the uniformity,relative density,crystallinity of films,which influence photoelectric properties of ... |
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| Keywords: | ultrasonic spray pyrolysis In2S3 film substrate temperature band gap |
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