Characterization of the variation of the material properties in a freestanding inhomogeneous thin film |
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Authors: | Xiaoshan Cao Insu Jeon |
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Institution: | a School of Mechanical Systems Engineering, Chonnam National University, 300 Yongbong-dong, Buk-gu, Gwangju 500-757, Republic of Korea b MOE Key Laboratory for Strength and Vibration, School of Aerospace, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China |
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Abstract: | This Letter presents a new technique for measuring the variation of the material properties along the thickness in a freestanding inhomogeneous thin film. The analytical results reveal a simple relation between the material properties and the set of cut-off frequencies of Lamb waves. The influence of the graded properties on the variation of cut-off frequencies in three different kinds of models, including artificial FGM model, sub-surface damage model, and nano-porous thin film model, is discussed. These results provide theoretical guidance for characterizing the material property variations of MEMS/NEMS. |
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Keywords: | Lamb wave Functionally graded material (FGM) Cut-off frequency Wentzal-Kramers-Brillouin (WKB) method Material property variation |
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