Linearization and minimization of cyclic error with heterodyne laser interferometry |
| |
Authors: | McRae Terry G Hsu Magnus T L Freund Christopher H Shaddock Daniel A Herrmann Jan Gray Malcolm B |
| |
Institution: | National Measurement Institute Australia, Bradfield Road, Lindfield, New South Wales 2070, Australia. terry.mcrae@measurement.gov.au |
| |
Abstract: | We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ~50 pm for our custom Glan-Laser interferometer and ~100 pm for a commercial interferometer. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |
|