Simple fabrication of an antireflective hemispherical surface structure using a self-assembly method for the terahertz frequency range

A hemispherical surface structure was fabricated on a sapphire substrate by utilizing a self-assembly and spin-coating process for a terahertz (THz) antireflection coating. The self-assembled glass spheres and spin-coated material led to a gradual change in the effective refractive index. The aspect ratio of the hemispherical surface structure was controlled easily by adjusting the thickness of the B-staged bisbenzocyclobutene used as a coating. The reflectance of the fabricated hemispherical surface structure, having a period of 140 μm, exhibited low reflectance and low Fabry-Perot resonance in a THz spectral range from 0.1 to 1.9 THz.