Inversion layer resistance in silicon inversion layer solar cells

The inversion layer resistance is very important for metal-insulator-semiconductor inversion layer (MIS/IL) solar cells, and usually it is the main part of the series resistance. It is found that the inversion layer resistance and the junction depth are determined by the operating voltage for an MIS/IL solar cell. On the basis of MIS theory, a general relationship between the operating voltage and the inversion layer resistance (and the junction depth) has been investigated. Practical computations have been done for MIS/IL solar cells with a silicon nitride insulator layer. It is found that the inversion layer resistance has a minimum value for operating voltage near 0.4 V, and the junction depth decreases monotonically with the increase of the operating voltage.