Universal quantification of elastic scattering effects in AES and XPS |
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| Institution: | 1. Physics Department, Faculty of Science, Menoufia University, Shebin El-Koom 32511, Menoufia, Egypt;2. National Institute for Standards, El-Haram, P.O Box: 136, Giza, CN. 12211, Egypt;3. Dental Laboratory Technology Program, Faculty of Applied Health Science Technology, 6 October Technological University, Giza, Egypt;1. Department of Chemical and Environmental Engineering, Sehan University, Jeonnam 526-702, Republic of Korea;2. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA;3. School of Chemical Engineering, Chonnam National University, Gwangju 500-757, Republic of Korea;1. Department of Physics, Shantou University, 243 Daxue Road, Shantou, 515063 Guangdong, China;2. Department of Physics, University of the Free State, PO Box 339, Bloemfontein, ZA9300, South Africa |
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| Abstract: | Elastic scattering of photoelectrons in a solid can be accounted for in the common formalism of XPS by introducing two correction factors, βeff and Qx. In the case of AES, only one correction factor, QA, is required. As recently shown, relatively simple analytical expressions for the correction factors can be derived from the kinetic Boltzmann equation within the so-called “transport approximation”. The corrections are expressed here in terms of the ratio of the transport mean free path (TRMFP) to the inelastic mean free path (IMFP). Since the available data for the TRMFP are rather limited, it was decided to complete an extensive database of these values. They were calculated in the present work for the same elements and energies as in the IMFP tabulation published by Tanuma et al. An attempt has been made to derive a predictive formula providing the ratios of the TRMFP to the IMFP. Consequently, a very simple and accurate algorithm for calculating the correction factors βeff, Qx and QA has been developed. This algorithm can easily be generalized to multicomponent solids. The resulting values of the correction factors were found to compare very well with published values resulting from Monte Carlo calculations. |
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