Quantitation of major elements with secondary ion mass spectrometry by using M
2
+
-molecular ions |
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| Authors: | Johan Vlekken Ting-Di Wu Marc D’Olieslaeger Gilbert Knuyt Wilfried Vandervorst Luc De Schepper |
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| Institution: | 1. Institute for Materials Research, Materials Physics Division, Limburgs Universitair Centrum, Universitaire Campus, Wetenschapspark 1, B-3590, Diepenbeek, Belgium
2. IMEC v.z.w., Kapeldreef, Leuven, Belgium
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| Abstract: | A new quantitation method, based on the detection of M2+ molecular ions, is presented. It has been shown that M2+ molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M2+ molecular ions can be used to quantitate major elements. The method will be used for quantitation of an AlxGa1?xAs multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission. |
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