Quantitation of major elements with secondary ion mass spectrometry by using M
2
+
-molecular ions |
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| Authors: | Johan Vlekken Ting-Di Wu Marc D’Olieslaeger Gilbert Knuyt Wilfried Vandervorst Luc De Schepper |
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| Institution: | 1. Institute for Materials Research, Materials Physics Division, Limburgs Universitair Centrum, Universitaire Campus, Wetenschapspark 1, B-3590, Diepenbeek, Belgium
2. IMEC v.z.w., Kapeldreef, Leuven, Belgium
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| Abstract: | A new quantitation method, based on the detection of M2+ molecular ions, is presented. It has been shown that M2+ molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M2+ molecular ions can be used to quantitate major elements. The method will be used for quantitation of an AlxGa1−xAs multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission. |
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