| Affiliation: | (1) Dipartimento di Ingegneria delle Costruzioni Meccaniche, Nucleari, Aeronautiche e di Metallurgia (D.I.E.M.) and C.I.R.A.M., Universitá degli Studi di Bologna, Via Saragozza 8, 40123 Bologna, Italy |
| Abstract: | In this paper, we numerically investigate the 3-D effects of different flow operating conditions and of complete or simplified treatments of the electromagnetic field on the characteristics of Ar and Ar/N2 discharges in inductively coupled plasma torches working at atmospheric pressure. Simulations are performed by means of the commercial code FLUENT suitably customized to solve the electromagnetic field equations in the frame of an extended grid model. Steady state continuity, momentum and energy equations are solved for optically thin plasmas under the assumption of LTE and laminar flow. Results of parameterization on the net amount of power dissipated in the discharge, frequency of the RF generator, flow rate distribution of inlet gases and swirl velocity are presented, showing the impact of these parameters on the fluid dynamic and electromagnetic behaviour of the plasma.Received: 22 May 2003, Published online: 5 August 2003PACS: 52.75.Hn Plasma torches - 52.65.-y Plasma simulation - 52.80.Pi High-frequency and RF discharges |
