a Department of Nuclear Engineering, Korea Advanced Institute of Science and Technology, Daejon 305–701, South Korea
b Applied Physics Laboratory, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, South Korea
Abstract:
Islands of BaTiO3 in a thin film deposited on a (111) InSb substrate by metalorganic chemical vapor deposition at a temperature of 300°C were investigated. Refractive index measured by ellipsometer using a He-Ne laser was 1.95, which is nearly the same value as that of amorphous BaTiO3 with microcrystals. X-ray diffraction peaks showed the deposit to be mostly amorphous and partly crystalline having the 110BaTiO3 direction normal to the (111) InSb. Transmission electron microscopy results showed that partially epitaxial BaTiO3 islands with periodic misfit dislocations had been formed at the interface between amorphous BaTiO3 thin layer and the (111) InSb substrate. These BaTiO3 islands on the (111) InSb substrate formed at a low growth temperature were three-dimensional nuclei which were closely associated with surface irregularities of the (111) InSb substrate.