A search for a thermal spike effect in sputtering |
| |
| Authors: | W O Hofer K Besocke B Stritzker |
| |
| Institution: | 1. Institut für Grenzfl?chenforschung und Vakuumphysik, Kernforschungsanlage Jülich, D-5170, Jülich, Fed. Rep. Germany
2. Institut für Festk?rperforschung, Kernforschungsanlage Jülich, D-5170, Jülich, Fed. Rep. Germany
|
| |
| Abstract: | The temperature dependence of the sputtering yield was measured for lOOkeV per atom bombardment of silver with molecular and atomic antimony ions. No exponential increase of the yield was found in the temperature range from 25° to 775 °C, although a pronounced nonlinear effect is observed when the yield of these projectiles is compared,Y(Sb 2 + )≈ 1.5×2Y(Sb+)]. We conclude that there is no influence of the lattice temperature on collision spikes. |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
