Laser-induced vibrations of micro-beams under different boundary conditions |
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Authors: | Yuxin Sun Daining Fang Masumi Saka Ai Kah Soh |
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Affiliation: | 1. Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan;2. Department of Engineering Mechanics, Tsinghua University, Beijing 100084, PR China;3. Department of Mechanical Engineering, University of Hong Kong, Hong Kong, PR China |
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Abstract: | In this study, the vibration phenomenon during pulsed laser heating of a micro-beam is investigated. The beam is made of silicon and is heated by a non-Gaussian laser beam with a pulse duration of 2 ps, which incites vibration due to the thermoelastic damping effect. The coupling between the temperature field and stress field induces energy dissipation and converts mechanical energy into heat energy, which is irreversible. An analytical–numerical technique based on the Laplace transform is used to calculate the vibration of the deflection and thermal moment. A general algorithm of the inverse Laplace transform is developed. The validation of this algorithm is obtained through comparison with numerical results obtained by the FEMLAB software package. The effect of laser pulse energy absorption depth is studied. The size effect and the effect of different boundary conditions are also analyzed. Finally, the damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are compared. |
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