X-ray photoelectron spectroscopy of tin oxide nanolayers

X-ray photoelectron spectra of 30- and 100-nm nanolayers, recorded in the energy range 0–35 eV, show a strong dependence of both the distribution of the density of Sn 5s, p+ O₂ p valence states and the change in the intensity ratio for the Sn 4d and O 2s subvalence states on the annealing temperature and nanolayer thickness. In the nanolayers fabricated at an annealing temperature of 450°C, an unusually strong band of O 2s states of unbound oxygen is observed, which is retained for nanolayers doped with palladium and disappears for nanolayers doped with gold and silver.