Investigation of surface topography, morphology and structure of amorphous carbon films by AFM and TEM |
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| Authors: | H-J Scheibe D Drescher A Kolitsch and A Mensch |
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| Institution: | (1) Fraunhofer-Institut für Werkstoffphysik und Schichttechnologie, Helmholtzstrasse 20, D-01069 Dresden, Germany;(2) Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf e. V., Postfach 510119, D-01314 Dresden, Germany;(3) Institut für Werkstoffwissenschaft, TU Dresden, D-01062 Dresden, Germany |
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| Abstract: | Morphology and structure of amorphous carbon films deposited with a pulsed arc source (LASER-ARC) have been studied using microscopical methods (SEM, TEM and AFM), electron diffraction and spectroscopical investigation (EELS). The parameters of the arc source and the deposition conditions (substrate temperature) influence morphology and structure of deposited amorphous carbon films. Especially the incorporation and growth of particles, embedded in the film have been investigated. By particle analysis using an optical microscope a majority of particles that is smaller than 500 nm has been determined. The morphology has been also demonstrated similar by AFM and TEM images. Their number and size of particles is strongly influenced by the deposition temperature. The structure of amorphous film is characterized by the EELS-spectra, but the particle structure was not detectable. |
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