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Microplasmas: scientific challenges &; technological opportunities
Authors:K H Becker  H Kersten  J Hopwood and J L Lopez
Institution:(1) Department of Optics, Physics Faculty, Martin Luther University Halle-Wittenberg, Hoher Weg 8, 06120 Halle (Saale), Germany;(2) Institute for Analytical Sciences-ISAS, Albert-Einstein-Str. 9, 12489 Berlin, Germany;(3) Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801, USA;(4) Institute for Analytical Sciences-ISAS, Bunsen-Kirchhoff-Str.11, 44139 Dortmund, Germany;
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