总装调对心干涉仪的设计与测量精度分析

为了满足大口径光学系统各分立元件的高精度对心要求 ,设计制造了总装调对心干涉仪。介绍了仪器的工作原理及关键结构工艺 ,并对影响偏心测量的因素进行了讨论。仪器的测量精度同被测镜的曲率半径及两测量点的间距有关。当被测镜的曲率半径小于 1.5 m、两测量点的间距为 5 0 0 mm时 ,其偏心测量精度小于 1μm,仪器的测量偏心角度的最小格值达 0 .12

Design and accuracy analysis of the alignment interferometer

For adapting the high accurate alignment of large optical system,the align interferometer is developed. In this paper,the working principle of the interferometer and the important mechanical structure are introduced,and the influence factors of the measurement accuracy are discussed. It is confirmed that the measuring accuracy is concerned with the radius of curvature and the distance between two measuring points. When the radius of curvature is 1.5m, the distance between two measuring points is 500mm, the measurement accuracy is 1μm. The measuring precision of angles is 0.12″.