|
|||||
|
|
| 高度(100)取向的BST薄膜及其高介电调谐率 | |
| 引用本文： | 蒋力立,黄开胜,唐新桂,陈王丽华.高度(100)取向的BST薄膜及其高介电调谐率[J].电子元件与材料,2005,24(12):29-31,34. |
| 作者姓名： | 蒋力立 黄开胜 唐新桂 陈王丽华 |
| 作者单位： | 1. 广东工业大学自动化学院,广东,广州,510090;广东工业大学实验中心,广东,广州,510090 2. 广东工业大学自动化学院,广东,广州,510090 3. 广东工业大学物理与光电工程学院,广东,广州,510090 4. 香港理工大学应用物理系,香港,九龙红墈 |
| 摘 要： | 用脉冲激光沉积法制备(Ba1-xSrx)TiO3(x=0.35,0.50简称BST35和BST50)介电薄膜。在650℃原位退火10min,获得高度(100)取向柱状生长的晶粒。BST35薄膜的平均晶粒尺寸为50nm,BST50薄膜的晶粒尺寸为150~200nm。在室温和1MHz条件下,BST35的最大εr和调谐率分别达到810和76%,其介电调谐率高于国内外同类文献报道的数据;BST50的εr和调谐率最大分别达到875和63%。薄膜为(100)取向生长,因为薄膜沿平面c轴极化而产生应力,在电场作用下,而获得高介电调谐率。 |
| 关 键 词： | 无机非金属材料 钛酸锶钡薄膜 脉冲激光沉积 柱状晶粒 介电调谐特性 探测优值 |
| 文章编号： | 1001-2028（2005）12-0029-03 |
| 收稿时间： | 2005-07-04 |
| 修稿时间： | 2005-07-04 |
High (100)-orientation and High Dielectric Tunability of (Ba1-xSrx)TiO3 Thin Films |
|
| JIANG Li-li,HUANG Kai-sheng,TANG Xin-gui,CHANWANG Li-hua.High (100)-orientation and High Dielectric Tunability of (Ba1-xSrx)TiO3 Thin Films[J].Electronic Components & Materials,2005,24(12):29-31,34. | |
| Authors: | JIANG Li-li HUANG Kai-sheng TANG Xin-gui CHANWANG Li-hua |
| Institution: | 1. Faculty of Automation, Guangdong University of Technology, Guangzhou 510090, China; 2. The Center of Tester and Analyzer, Guangdong University of Technology, Guangzhou 510090, China; 3. Faculty of Physics and Optoelectric Engineering, Guangdong University of Technology, Guangzhou 510090, China; 4. Department of Applied Physics and Materials Research Centre, The HongKong Polytechnic University, Hong Kong |
| Abstract: | (Ba0.65Sr0.35)TiO3(BST35)and(Ba0.50Sr0.50)TiO3(BST50)thin films were deposited on Pt(111)/Ti/SiO2/Si(100)substrates prepared by a pulsed laser deposition at 650℃.The thin films were in situ annealed at 650℃ for 10 min,the highly(100)-oriented columnar-grained BST thin films were obtained.The dielectric constant εr and dielectric tunabilities of BST35 and BST50 thin films are 810 and 76%,875 and 63%,respectively.The tunability of BST35 thin film is higher than that of pure and compositionally graded BST thin films have been reported.The high tunability is attributed to the(100)texture of the film leading to an enhancement of the in-plane oriented polar axis. |
| Keywords: | inorganic non-metallic materials BST thin film pusled laser deposition columnar-grained dielectric tunability figure of merit composite |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |