| 制备类金刚石薄膜过程中的等离子体发射光谱 |
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| 引用本文： | 张慰萍,陈竞,方容川,胡克良. 制备类金刚石薄膜过程中的等离子体发射光谱[J]. 物理化学学报, 1992, 8(3): 383-388. DOI: 10.3866/PKU.WHXB19920318 |
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| 作者姓名： | 张慰萍 陈竞 方容川 胡克良 |
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| 作者单位： | Department of Physics, University of science and Technology of China, Hefei 230026 |
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| 摘 要： | 测定了不同反应条件下, 不同空间位置的等离子体发射光谱, 并与相应条件下生成的类金刚石薄膜的红外吸收谱进行对照, 分析了它们之间的关系。
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| 关 键 词： | 等离子体发射光谱 辉光放电 类金刚石薄膜 |
| 收稿时间： | 1991-02-10 |
| 修稿时间： | 1991-10-06 |
OPTICAL EMISSION SPECTROSCOPY IN DIAMOND-LIKE CARBON FILM DEPOSITION |
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| Zhang Weiping,Chen Jing,Fang Rongchuan,Hu Keliang. OPTICAL EMISSION SPECTROSCOPY IN DIAMOND-LIKE CARBON FILM DEPOSITION[J]. Acta Physico-Chimica Sinica, 1992, 8(3): 383-388. DOI: 10.3866/PKU.WHXB19920318 |
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| Authors: | Zhang Weiping Chen Jing Fang Rongchuan Hu Keliang |
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| Affiliation: | Department of Physics, University of science and Technology of China, Hefei 230026 |
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| Abstract: | We measured the optical emission spectra (OES) of glow discharged plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the OES and the deposition parameters, such as rf power, gas pressure and the distances from the lower electrode. The infrared absorption of films were also measured and the results of infraredabsorption were compared with that of OES measurement. |
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| Keywords: | Optical emission spectroscopy Glow discharge Diamond-like oarbon film |
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