Electrostatic spray deposited zinc oxide films for gas sensor applications |
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Authors: | Camelia Matei Ghimbeu Joop Schoonman Maryam Siadat |
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Institution: | a L.I.C.M. Groupe Capteurs, University Paul Verlaine-Metz, 1 Bd. Arago, 57078 Metz Cedex 3, France b Delft Institute for Sustainable Energy, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands |
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Abstract: | In this work, thin films of zinc oxide (ZnO) for gas-sensor applications were deposited on platinum coated alumina substrate, using electrostatic spray deposition (ESD) technique. As precursor solution zinc acetate in ethanol was used. Scanning electron microscopy (SEM) evaluation showed a porous and homogeneous film morphology and the energy dispersive X-ray analysis (EDX) confirmed the composition of the films with no presence of other impurities. The microstructure studied with X-ray diffraction (XRD) and Raman spectroscopy indicated that the ZnO oxide films are crystallized in a hexagonal wurtzite phase. The films showed good sensitivity to 1 ppm nitrogen dioxide (NO2) at 300 °C while a much lower sensitivity to 12 ppm hydrogen sulphide (H2S). |
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Keywords: | 68 37 Yz 68 47 Gh 68 55 Jk 78 30&minus j |
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