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The surface of TiO2 gate of 2DEG-FET in contact with electrolytes for bio sensing use
Authors:Kazunari Ozasa  Shigeyuki Nemoto  Katsumi Mochitate  Mizuo Maeda
Institution:a RIKEN (The Institute of Physical and Chemical Research), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
b CREST-JST, 3-1-6-5 Shibuya, Tokyo 150-0002, Japan
c National Institute for Environmental Studies, 16-2 Onogawa, Tsukuba, Ibaraki 305-8506, Japan
Abstract:In order to apply two-dimensional electron-gas-field-effect-transistors (2DEG-FETs) for cell-viability sensors, we investigated the chemical/electrical properties of TiO2 thin films (13-17 nm) prepared with the sol-gel technique on the gate surface of AlGaAs/GaAs 2DEG-FETs. Photochemical/electrochemical reactions on GaAs surface in electrolytes, which induce the degradation of 2DEG-FET performance, are effectively suppressed by introducing a TiO2 thin film on the gate area of 2DEG-FETs. Compared to conventional ion-selective FETs (ISFETs), the TiO2/2DEG-FETs in this study exhibit a high sensitivity (410 mV/mM) for H2O2 detection. TiO2 surfaces show better biocompatibility than GaAs surfaces as demonstrated by direct cell culture on these surfaces.
Keywords:73  40  Qv  73  90  +f  73  61  Ng  73  20  &minus  r
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