Field emission from nano-patterned amorphous carbon |
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| Authors: | Zengmei Wang Jian Wang Dejie Li |
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| Institution: | Department of Electronic Engineering, Tsinghua University, Beijing 100084, People's Republic of China |
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| Abstract: | Electron emission from nano-patterned amorphous carbon is realized in this paper. The patterned carbon consists of islands with size of tens of nanometers, and is formed by etching uniform carbon film in oxygen plasma using a bismuth island-like film as the mask. Uniform and stable electron emission is reproducibly obtained, and the emission efficiency is above 2% at an anode voltage of 3 kV. Small carbon particles between large islands are supposed to be necessary for stable electron emission. |
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| Keywords: | 79 70 +q 73 40 Gk 78 55 Qr |
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