| 基于光栅检测的显微镜闭环扫描控制系统的设计 |
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| 引用本文： | 吴耀春,萧泽新.基于光栅检测的显微镜闭环扫描控制系统的设计[J].光学与光电技术,2008,6(2):71-74. |
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| 作者姓名： | 吴耀春 萧泽新 |
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| 作者单位： | 1. 安阳工学院,河南,安阳,455000
2. 桂林电子科技大学光机电一体化研究所,广西,桂林,541004 |
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| 摘 要： | 高精度扫描控制系统是现代扫描显微系统的重要组成部分，它影响着扫描显微镜对样品的扫描成像质量。提出了一种基于光栅检测的单片机闭环扫描控制系统的设计方案。该系统采用PC上位机发送指令，下位单片机控制扫描工作台的移动，光栅作为检测元件输出脉冲信号。单片机控制电路实现脉冲的计数并计算误差值，控制步进电机进行误差补偿。步进电机的硬件细分驱动，实现了步距2细分、4细分、8细分。实验结果表明该系统的重复定位精度达到0．005mm，满足扫描显微镜对扫描控制系统的要求。
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| 关 键 词： | 光栅检测 硬件细分 上位机 重复定位精度 |
| 收稿时间： | 2007/7/15 |
Design of Microscopical Closed-Loop Scanning and Control System Based on Grating Checks |
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| WU Yao-chun,XIA Ze-xin.Design of Microscopical Closed-Loop Scanning and Control System Based on Grating Checks[J].optics&optoelectronic technology,2008,6(2):71-74. |
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| Authors: | WU Yao-chun XIA Ze-xin |
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| Institution: | WU Yao-chun1 XIAO Ze-xin2 (1 Anyang Institute of Technology,Anyang 455000,China,2 Institute of Opto-Mechatronics,Guilin University of Electronic Technology,Guilin 541004,China) |
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| Abstract: | A high precision scanning and control system is an important part in modern scanning microsystem, which affects the quality of sample imaging for scanning microscope. A design method of microcomputer closed-loop scanning and control system based on grating check is presented. The orders are dispateched by PC. The movement of the scanning working table is controlled by the signal-chip. The pulse signals are put out by gratting. The numbers of pulse are counted and the error is calculated by the signal-chip c... |
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| Keywords: | grating check subdividing and driving by hardware PC re-orientation accuracy |
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