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Integrated micro-plasmas in silicon operating in helium |
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| Authors: | R. Dussart L. J. Overzet P. Lefaucheux T. Dufour M. Kulsreshath M. A. Mandra T. Tillocher O. Aubry S. Dozias P. Ranson J. B. Lee M. Goeckner |
| Affiliation: | 1. GREMI, CNRS/University of Orleans, 14 rue d’Issoudun, BP 6744, 45067, Orléans Cedex 2, France 2. Plasma Science and Applications Laboratory, University of Texas at Dallas, 800 W. Campbell Road, RL10, Richardson, TX, 75080-3021, USA |
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