a Applied Technology Associates, 1900 Randolph SE, Albuquerque, NM 87106, USA
b Intellite Corporation, 1717 Louisiana NE, Albuquerque, NM 87110, USA
c Air Force Research Laboratory, Directed Energy Directorate, Kirtland AFB, NM 87117, USA
Abstract:
Micromachined electrostatic membrane mirrors have been in use for several years in active and adaptive optics applications. We introduce a deformable mirror with small static aberrations and resistant to damage during electrostatic snap-down in an architecture designed so that a multi-layer dielectric coating that can be applied before the mirror is released. We also make laboratory performance measurements and produce a closed-loop control algorithm.