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Novel micromachined membrane mirror characterization and closed-loop demonstration
Authors:David C Dayton  Justin D Mansell  John D Gonglewski  Sergio R Restaino
Institution:

a Applied Technology Associates, 1900 Randolph SE, Albuquerque, NM 87106, USA

b Intellite Corporation, 1717 Louisiana NE, Albuquerque, NM 87110, USA

c Air Force Research Laboratory, Directed Energy Directorate, Kirtland AFB, NM 87117, USA

Abstract:Micromachined electrostatic membrane mirrors have been in use for several years in active and adaptive optics applications. We introduce a deformable mirror with small static aberrations and resistant to damage during electrostatic snap-down in an architecture designed so that a multi-layer dielectric coating that can be applied before the mirror is released. We also make laboratory performance measurements and produce a closed-loop control algorithm.
Keywords:Membrane mirror  Adaptive optics
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