|
|||||
|
|
Effect of mass spectrometric sampling interface on the fundamental parameters of an inductively coupled plasma as a function of its operating conditions: Part I. Applied r.f. power and vacuum |
|
| Authors: | Gerardo Gamez Scott A Lehn Mao Huang Gary M Hieftje |
| Institution: | Department of Chemistry, Indiana University, Bloomington, IN 47405, USA |
| Abstract: | |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ | |