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A study on the structural and mechanical properties of ordered mesoporous Al2O3 film
Authors:Tae-Jung Ha  Seok-Jin Yoon
Affiliation:a Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Republic of Korea
b Thin Film Materials Research Center, KIST, Seoul 130-650, Republic of Korea
Abstract:Ordered mesoporous aluminum oxide films with a porosity range of 40-48% were synthesized by an evaporation-induced self-assembly (EISA) process using surfactant templating. To investigate the role of the hydrolysis reaction in the formation of a mesoporous structure, the changes of pore structure properties according to a variation of aging time and water molar ratio were monitored. From the tendencies of pore structure properties, the optimized condition for a high porosity and a highly ordered pore structure in ordered mesoporous alumina film was determined. This alumina film maintained the mesoporous structure even though it annealed at high temperatures, up to 1200 °C. Therefore, the ordered mesoporous alumina films synthesized in this study could be applicable as a material used at high temperature.
Keywords:78.55.Mb porous materials
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