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Properties of Gallium Oxide Films Obtained by HF-Magnetron Sputtering |
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| Authors: | T. Z. Lygdenova V. M. Kalygina V. A. Novikov I. A. Prudaev O. P. Tolbanov A. V. Tyazhev |
| Affiliation: | 1.National Research Tomsk State University,Tomsk,Russia |
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