Affiliation: | (College of Electronic Information and Optical Engineering,Nankai University,Tianjin 300071,China;Microsystem and Terahertz Research Center,China Academy of Engineering Physics,Chengdu 610200,China;Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621999,China;Key Laboratory of Photoelectronic Thin Film Devices and Technology of Tianjin,Tianjin 300350,China) |