Methods of ellipsometric analysis of polarization optical properties of inhomogeneous surface layers of optoelectronics elements |
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| Authors: | V S Zemlyanskiĭ I A Khramtsovskiĭ A N Gorlyak A A Stepanchuk |
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| Institution: | (1) St. Petersburg State University of Information Technologies, Mechanics, and Optics, St. Petersburg, 197101, Russia;(2) Electrotechnical University, St. Petersburg, 197376, Russia;(3) St. Petersburg Institute of Technology, St. Petersburg, 198013, Russia |
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| Abstract: | The basic regularities of changes in the main ellipsometric parameters of a light beam reflected from inhomogeneous surface layers of silicate glasses have been described on the basis of the Drude-Born theories of polarized light reflection. A method of physicomathematical modeling of the refractive index profile in an inhomogeneous surface layer of silicate glasses is reported, which makes it possible to determine, with the lowest second-kind error probability, a model of an inhomogeneous reflecting system that is adequate to the object of study. |
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