|
|||||
|
|
Structure,optical properties and thermal stability of HfErO films deposited by simultaneous RF and VHF magnetron sputtering |
|
| Authors: | H Y Zhang H J He Z Zhang C G Jin Y Yang Y Y Wang L J Zhuge C Ye X M Wu |
| Institution: | 1. College of Physics, Optoelectronics and Energy and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215006, China 2. School of Tongda, Nanjing University of Posts and Telecommunications, Nanjing, 210003, China 3. Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province and Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China 4. Analysis and Testing Center, Soochow University, Suzhou, 215123, China 5. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai, 200050, China |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |