Sub-nanoscale nanoimprint fabrication of atomically stepped glassy substrates of silicate glass and acryl polymer |
| |
Authors: | Mamoru Yoshimoto |
| |
Institution: | 1. Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259-J3-16, Nagatsuta, Midori, Yokohama, 226-8502, Japan
|
| |
Abstract: | |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|