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Multi-oxide active layer deposition using Applied Materials Pivot array coater for high-mobility metal oxide TFT |
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| Authors: | Hyun Chan Park Evelyn Scheer Karin Witting Markus Hanika Marcus Bender Hao Chien Hsu Dong Kil Yim |
| Affiliation: | 1. Applied Materials GmbH & Co. KG, Alzenau, Germany 2. AKT Display Product Group, Applied Materials, Santa Clara, CA, USA |
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| 本文献已被 SpringerLink 等数据库收录！ | |