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Hardness and modulus of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition |
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| Authors: | Kenji Hanada Tomohiro Yoshida You Nakagawa Hiroki Gima Aki Tominaga Masaaki Hirakawa Yoshiaki Agawa Takeharu Sugiyama Tsuyoshi Yoshitake |
| Institution: | 1. Research Center for Synchrotron Light Applications, Kyushu University, Kasuga, Fukuoka, 816-8580, Japan 2. Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka, 816-8580, Japan 3. Department of Electrical and Electronics Engineering, Kurume National College of Technology, Kurume, Fukuoka, 830-8555, Japan 4. ULVAC, Sammu, Chiba, 289-1226, Japan 5. ULVAC-RIKO, Yokohama, Kanagawa, 224-0053, Japan |
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