1.Nikolaev Institute of Inorganic Chemistry, Siberian Branch,Russian Academy of Sciences,Novosibirsk,Russia;2.Novosibirsk Branch, Institute of Semiconductor Physics, Siberian Branch,Russian Academy of Sciences,Novosibirsk,Russia
Abstract:
Processes of water vapor penetration into the air gap between a polyimide film and a substrate are analyzed using monochromatic
zero ellipsometry and multilayer optical models of an organic film-glass substrate system; changes in the optical parameters
of this system are detected. Models for water vapor penetration into this interlayer are proposed on the basis of analysis
of electron microscopic images of the substrate and film surfaces.