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| Effects of preparation parameters on growth and properties of β-Ga2O3 film | |
| 作者姓名： | Zi-Hao Chen(陈子豪) Yong-Sheng Wang(王永胜) Ning Zhang(张宁) Bin Zhou(周兵) Jie Gao(高洁) Yan-Xia Wu(吴艳霞) Yong Ma(马永) Hong-Jun Hei(黑鸿君) Yan-Yan Shen(申艳艳) Zhi-Yong He(贺志勇) and Sheng-Wang Yu(于盛旺) |
| 作者单位： | College of Materials Science and Engineering, Taiyuan University of Technology, Taiyuan 030024, China |
| 基金项目： | Project supported by the Science and Technology Major Project of Shanxi Province, China (Grant No. 20181102013), the "1331 Project" Engineering Research Center of Shanxi Province, China (Grant No. PT201801), and the Natural Science Foundation of Shanxi Province, China (Grant No. 201801D221131). |
| 摘 要： | |
| 收稿时间： | 2022-02-13 |
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