| 基于飞秒激光加工的微纳高温光纤振动传感器 |
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| 引用本文： | 张柳超,江毅,王素梅,刘达.基于飞秒激光加工的微纳高温光纤振动传感器[J].光学技术,2017,43(4):334-338. |
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| 作者姓名： | 张柳超 江毅 王素梅 刘达 |
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| 作者单位： | 1. 北京理工大学 光电学院,北京,100081;2. 北京理工大学 激光微纳制造研究所,北京,100081;3. 中自高科(苏州)光电有限公司,苏州,215000 |
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| 基金项目： | 国家863项目，国家自然科学基金项目 |
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| 摘 要： | 报道了一种基于飞秒激光加工的微纳高温振动传感器。通过熔接形成单模光纤-空芯光纤-单模光纤的结构,利用单模光纤和空芯光纤在熔接面形成的菲涅尔反射,构成外腔式法布里-珀罗干涉仪(EFPI)。用飞秒激光烧蚀空芯光纤,形成悬臂梁结构。末端的单模光纤作为质量块,在受到振动时带动悬臂梁振动,使悬臂梁产生微弯,进而使EFPI腔长发生变化。实验结果表明,传感器的工作区域为20~300Hz,在100Hz时,0~3.01g范围内测得加速度分辨率为5×10-4 g,加速度响应灵敏度为129.6nm/g。传感器受温度影响小,腔长的温度交叉响应仅为0.225nm/℃,传感器可耐950℃高温冲击。
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| 关 键 词： | 振动传感器 高温传感器 飞秒激光加工 外腔式法布里-珀罗干涉仪(EFPI) |
A micro fiber optic vibration sensor fabricated by femtosecond laser for high temperature applications |
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| ZHANG Liuchao,JIANG Yi,WANG Sumei,LIU Da.A micro fiber optic vibration sensor fabricated by femtosecond laser for high temperature applications[J].Optical Technique,2017,43(4):334-338. |
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| Authors: | ZHANG Liuchao JIANG Yi WANG Sumei LIU Da |
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| Abstract: | A micro vibration sensor fabricated by femtosecond laser for high-temperature applications is demonstrated.The sensor is based on the configuration of an extrinsic Fabry-Perot interferometer (EFPI), which is formed by a hollow core fiber (HCF) sandwiched between two sections of single mode fiber (SMF).Part of the HCF is removed by a femtosecond laser and a cantilever beam is obtained.A section of the SMF acting as the mass block can oscillate vertically when the sensor is subject to vibration.Within the frequency range of 20-300Hz, the experimental results show that the sensitivity of 129.6nm/g@100Hz is achieved in the acceleration range from 0 to 3.01g.The temperature response of the EFPI cavity is 0.225nm/℃.The sensor can operate stably at a high temperature of 950℃. |
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| Keywords: | vibration sensor high-temperature sensor femtosecond laser machining extrinsic Fabry-Perot interferometer (EFPI) |
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