| 离子注入石英玻璃光波导的研究 |
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| 引用本文： | 鲁平,范俊清.离子注入石英玻璃光波导的研究[J].发光学报,1995,16(1):78-81. |
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| 作者姓名： | 鲁平 范俊清 |
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| 作者单位： | 中国科学院长春物理研究所, 长春 130021 |
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| 摘 要： | 在熔融石英玻璃衬底上,通过注入氮离子和硼离子,制成了低损耗、单模平面光波导.波导的最大折射率和离子浓度分布的半宽度分别是1.48和0.5μm,波导损耗<0.1dB/cm.
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| 关 键 词： | 光波导 离子注入 集成光学 |
| 收稿时间： | 1994-04-14 |
A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ |
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| Lu Ping,Fan Junqing,Xu Chengjie,Li Yi.A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ[J].Chinese Journal of Luminescence,1995,16(1):78-81. |
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| Authors: | Lu Ping Fan Junqing Xu Chengjie Li Yi |
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| Institution: | Changchun Institute of Physics, Chinese Academia Sciences, Changchun 130021 |
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| Abstract: | The low-loss single mode waveguides in fused quartz substrate were fabricated by nitrogen and boron ion implantation.The maximum index and half width of refractive index profile is 1.48 and 0.5 μm,respectively.The waveguide loss is less than 0.1 dB/cm. |
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| Keywords: | optical waveguide ion-implatation integrated optics |
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