利用相位恢复波前传感技术检测球面镜面形

为了验证相位恢复波前传感器系统波前检测的能力,搭建了基于相位恢复测量方法的波前传感器检测球面镜面形的实验平台。该平台结构简单,抗震动,可以在对光路不进行任何改变的前提下,利用成像系统上已有的相机对整个光学系统进行在位检测。为了验证相位恢复波前传感器测量方法的准确性,将相位恢复波前传感器测量结果与ZYGO干涉仪测量结果进行比较,实验结果表明在面形误差分布及误差的峰谷值(PV)和方均根值(RMS)上,两者具有极大的相似性,所以利用相位恢复波前传感器技术能有效地检测出球面镜的面形误差。

Spherical mirror estimation using phase retrieval wavefront sensor technology

In order to verify the estimated wavefront ability of the phase retrieval wavefront sensor (PRWS) system, a measured spherical mirror of experiment platform with the method of PRWS was set up, whose structure was simple and there was little affection of the platform and even can be ignored, even use the camera of the imaging system to estimate the whole optical system without changing anything. In order to validate the veracity of PRWS, PRWS measurement results were compared with ZYGO interferometer measurement results, experimental results demonstrate that good agreemented is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer, so using PRWS technology can effectively estimate the aberration of spherical mirror.