Geometrical Deviation and Residual Strain in Novel Silicon—on—Aluminium—Nitride Bonded Wafers 期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

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Geometrical Deviation and Residual Strain in Novel Silicon—on—Aluminium—Nitride Bonded Wafers

摘要：
关键词：	氮化铝硅衬底硅层衍射图样