Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements |
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| Authors: | V A Andreev K V Indukaev O K Ioselev A I Legkii G L Lazarev D A Orlov |
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| Institution: | (1) AMPHORA Labs Co. Ltd., Suite 701, Ul. Presnenskii Val 17, Moscow, 123557, Russia |
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| Abstract: | The construction and technical characteristics of the phase interferometric microscope MIM-2.1 are described. With the help
of this modulation interferometric microscope, a vertical resolution up to fractions of a nanometer and a lateral resolution
up to tens of nanometers are achieved. The results of measurements obtained on samples of different types, such as a column,
a step, a flute, and a fragment of a DVD disk, are presented. |
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| Keywords: | phase modulation microscopy surface microrelief resolution |
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