| 电子束直写制作低效取样光栅 |
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| 引用本文： | 高福华,曾阳素,谢世伟,郭永康,崔铮.电子束直写制作低效取样光栅[J].中国激光,2003,30(2):134-136. |
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| 作者姓名： | 高福华 曾阳素 谢世伟 郭永康 崔铮 |
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| 作者单位： | 1. 四川大学物理系,四川,成都,610064
2. 英国卢瑟福实验室 |
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| 基金项目： | 国家 8 6 3高技术 80 4项目，光束控制重点实验室项目资助 |
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| 摘 要： | 低效取样光栅是激光取样技术的一种重要元件 ,它可以看成离轴的二相位的菲涅耳波带板。基于菲涅耳波带板的形成原理 ,对取样光栅的变周期环带结构进行了理论分析 ,推导出取样光栅的透过率函数。并在此基础上 ,采用电子束直写加工光栅掩模 ,制作取样光栅。该方法与一般的光学全息方法相比 ,具有设计灵活、重复性好、适于大批量生产等优点。
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| 关 键 词： | 光学技术与仪器 低效取样光栅 电子束直写 菲涅耳波带板 |
| 收稿时间： | 2002/5/29 |
Using E-beam Direct Writing Method to Fabricate Low-efficiency Beam Sampling Grating |
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| GAO Fu hua ,ZENG Yang su ,XIE Shi wei ,GUO Yong kang ,CUI Zheng Physics.Using E-beam Direct Writing Method to Fabricate Low-efficiency Beam Sampling Grating[J].Chinese Journal of Lasers,2003,30(2):134-136. |
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| Authors: | GAO Fu hua ZENG Yang su XIE Shi wei GUO Yong kang CUI Zheng Physics |
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| Institution: | GAO Fu hua 1,ZENG Yang su 1,XIE Shi wei 1,GUO Yong kang 1,CUI Zheng 2 1Physics Department of Sichuan University,Chengdu,Sichuan 610064,China 2Rutherford Appleton Laboratory,Chilton,Didcot,Oxon OX11 0QX,U.K |
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| Abstract: | As one of the important optical technique in the field of laser sampling, low efficiency beam sampling grating (BSG) is widely used in high power laser system. It is an off axis, binary phase, Fresnel zone plate. In this paper, the principle of the variable period grating′ formation process is analyzed perfectly and the transmissive function of the BSG is obtained. Based on the analysis, a new method is presented to fabricate the BSG with electron beam direct writing. Compared with the holographic method, the new method is simpler, cheaper, and more efficient to manufacture elements on a large scale. |
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| Keywords: | optical technique and instrument low efficiency beam sampling grating electron beam direct writing Fresnel zone plate |
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