| 参数激励下静电驱动微机电系统动力特性研究 |
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| 引用本文： | 张文明,孟光,魏克湘.参数激励下静电驱动微机电系统动力特性研究[J].力学学报,2009,41(2):282-288. |
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| 作者姓名： | 张文明 孟光 魏克湘 |
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| 作者单位： | 上海交通大学 机械系统与振动国家重点实验室上海交通大学 机械系统与振动国家重点实验室湖南工程学院机械系,411101 |
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| 基金项目： | 国家自然科学基金(10602033,10802029,10325209);;中国博士后科学基金(20060400165)资助项目~~ |
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| 摘 要： | 充分考虑压膜阻尼效应的影响，提出参数激励下时变电容式静电驱动微机电系统的动力学模型，采用谐波平衡法分析在参数激励和强迫激励耦合作用下系统的幅频响应特性，探讨不同控制电压和频率比对系统幅频响应的影响，分别以交流电压幅值、频率比和压膜阻尼比为控制参数研究系统的非线性动力特性，结果表明，微尺度下静电驱动微机电系统在参数激励作用下存在较为丰富的分岔与混沌行为，压膜阻尼效应对系统动力特性的影响不可忽视.
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| 关 键 词： | 微机电系统 静电驱动 参数激励 压膜阻尼 |
| 收稿时间： | 2007-12-03 |
| 修稿时间： | 2008-05-28 |
DYNAMIC CHARACTERISTICS OF ELECTROSTATICALLY ACTUATED MEMS UNDER PARAMETRIC EXCITATIONS |
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| Zhang Wenming
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Meng Cuang
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Wei Kexiang.DYNAMIC CHARACTERISTICS OF ELECTROSTATICALLY ACTUATED MEMS UNDER PARAMETRIC EXCITATIONS[J].chinese journal of theoretical and applied mechanics,2009,41(2):282-288. |
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| Authors: | Zhang Wenming Meng Cuang Wei Kexiang |
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| Institution: | State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240}, ChinaState Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240}, ChinaState Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240}, China |
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| Abstract: | A dynamic model for the time-variable-electric-capacity-type electrostatically actuated micro- electro-mechanical systems(MEMS) under parametric excitations is presented with the effect of squeeze film damping.The harmonic balance(HB) method is applied to simulate the frequency response of this system under the combined parametric and forcing excitations.The effects of the applied voltages and frequency ratios on the frequency responses of the system are discussed.In addition,the nonlinear dynamic character... |
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| Keywords: | MEMS electrostatic actuation parametric excitation squeeze film damping |
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