Effects of UV-irradiation on the formation of oxide thin films from chemically modified metal-alkoxides |
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| Authors: | N. Tohge K. Shinmou T. Minami |
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| Affiliation: | (1) Department of Metallurgical Engineering, Kinki University, Kowakae, Higashi-Osaka, 577 Osaka, Japan;(2) Department of Applied Materials Science, Osaka Prefecture University, Gakuenchou, 593 Sakai, Osaka, Japan |
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| Abstract: | The effects of UV-irradiation on the properties of ZrO2 and TiO2 gel films prepared from corresponding metal-butoxides modified with acetylacetone (AcAc) or benzoylacetone (BzAc) have been studied. It was found that the chelate bonds of  -diketones remaining in the gel films were dissociated by the UV-irradiation. The UV-irradiation also changed the properties of the gel films such as solubility; the solubility in acidic solutions was decreased for ZrO2 gel films modified with AcAc and TiO2 gel films modified with BzAc became insoluble in alcohol. Based on these findings, a new fine-patterning process has been established, which enables us to make fine-patterns of ZrO2 and TiO2 films on a variety of substrates. |
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| Keywords: | film TiO2-ZrO2 patterning UV irradiation |
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